发明名称 |
Method for producing a silicon single crystal by a float-zone method |
摘要 |
A method of producing a silicon single crystal by the floating-zone method, comprising the steps of: providing a polysilicon rod having an average grain length of 10 to 1000 mu m; heating a portion of the polysilicon rod to form a molten zone while applying a magnetic field of 300 to 1000 gauss to the molten zone; and passing the molten zone through the length of the polysilicon rod thereby the polysilicon rod is converted into a silicon single crystal ingot through a one-pass zoning of the floating zone method. An apparatus for reducing the method into practice is also described.
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申请公布号 |
US5556461(A) |
申请公布日期 |
1996.09.17 |
申请号 |
US19940260919 |
申请日期 |
1994.06.15 |
申请人 |
SHIN-ETSU HANDOTAI CO., LTD. |
发明人 |
KIMURA, MASANORI;YAMAGISHI, HIROTOSHI |
分类号 |
C30B13/30;C30B13/00;C30B13/26;C30B29/06;H01L21/208;(IPC1-7):C30B13/02 |
主分类号 |
C30B13/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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