发明名称 Method for producing a silicon single crystal by a float-zone method
摘要 A method of producing a silicon single crystal by the floating-zone method, comprising the steps of: providing a polysilicon rod having an average grain length of 10 to 1000 mu m; heating a portion of the polysilicon rod to form a molten zone while applying a magnetic field of 300 to 1000 gauss to the molten zone; and passing the molten zone through the length of the polysilicon rod thereby the polysilicon rod is converted into a silicon single crystal ingot through a one-pass zoning of the floating zone method. An apparatus for reducing the method into practice is also described.
申请公布号 US5556461(A) 申请公布日期 1996.09.17
申请号 US19940260919 申请日期 1994.06.15
申请人 SHIN-ETSU HANDOTAI CO., LTD. 发明人 KIMURA, MASANORI;YAMAGISHI, HIROTOSHI
分类号 C30B13/30;C30B13/00;C30B13/26;C30B29/06;H01L21/208;(IPC1-7):C30B13/02 主分类号 C30B13/30
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