| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electrostatic chuck which is substantially provided with erosion resistance in the erosive gas environment. SOLUTION: A erosion resistant chuck 20 is provided with electrostatic material 22, supported by a base 24 having a peripheral edge 26. A notched part 28 at the peripheral edge 26 of the base supports an insulating electric connector 30, which electrically connects the electrostatic material 22 of the chuck 20 with a voltage supply equipment 62 in a process chamber 36. A demounting plug 40 in the notched part 28 partially covers the insulating electric connector 30 and protects the electric connector 30 from erosion in the process chamber 36. Preferably, the demounting plug 40 is provided with substantially an erosion resistant polymer, such as polyimide. Preferably, the demounting plug 40 is substantially formed in an L-shape, having an L-shaped bottom at the bottom of the notched part 28 and an L-shaped side adjoining the side of the notched part 28.</p> |
