| 摘要 |
<p>PURPOSE: To provide a heating temperature measuring type flow-rate/flow- velocity sensor which is excellent in a heat responsive sensitivity characteristic. CONSTITUTION: In the flow-rate/flow-velocity sensor which is provided with a case 8 in contact with a measuring object fluid, a heating source 2 which is arranged in the case 8 and whose heat is taken away by the measuring object fluid through the case 8 and a temperature measuring element 4 arranged in the vicinity of the heating source 2 in the case 8, and measures a flow rate or flow velocity of the measuring object fluid, a hollow layer 13 to substantially thermally cut off the heating source 2 and the temperature measuring element 4 from the other part on the opposite side of the measuring object fluid, is provided in the case 8. Air pressure in the hollow layer 13 is preferable to be not more than the atmospheric pressure. For example, the hollow layer 13 is arranged between a filler 10 filled in the case 8 or a cover of the case 8, the heating source 2 and the temperature measuring element 4.</p> |
