<p>PURPOSE:To improve the mechanical strength of a mask by depositing thin films having tensile stress on the main flat surface side and opposite side of a mask substrate.</p>
申请公布号
JPS5385170(A)
申请公布日期
1978.07.27
申请号
JP19770000169
申请日期
1977.01.05
申请人
HITACHI LTD;NIPPON TELEGRAPH & TELEPHONE;NIPPON ELECTRIC CO
