| 摘要 |
PROBLEM TO BE SOLVED: To obtain an acoustic device which has an electronic circuit such as a preamplifier supported by a piezoelectric membrane completely mechanically. SOLUTION: The membrane 14 completely supports the electronic circuit 28 in the active region of the membrane 14. The membrane 14 has at least one piezoelectrically active region 20 connected to the electronic circuit 28 by signal lines 18 and 26. The signal lines 18 and 26 are formed preferably on a membrane which uses integrated circuit fabrication techniques. In a preferred embodiment, the piezoelectrically active region 20 has a <=100μm diameter and the membrane 14 is <=10μm thick. Filling resin provided structural support of the membrane to insulate the on-membrane circuit. |
