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发明名称
FOLD-BACK INTERFERENCE MEASURING APPARATUS
摘要
申请公布号
JPH08233548(A)
申请公布日期
1996.09.13
申请号
JP19950037299
申请日期
1995.02.24
申请人
NIKON CORP
发明人
ICHIKAWA HAJIME;YAMAMOTO TAKAHIRO
分类号
G01B11/24;(IPC1-7):G01B11/24
主分类号
G01B11/24
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代理人
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