| 摘要 |
PURPOSE: To provide an electrostatic actuator in which the output is prevented from lowering owing to frictional resistance by arranging the electrodes of first and second fixed bodies while shifting from each other and setting the pitch of electrode on a movable body at a predetermined value. CONSTITUTION: Fixed bodies 1, 2 comprise insulators 1, 2 arranged, on the surface, with stripe electrodes 12n, 22m at a pitchλin the moving direction. The stripe electrodes are connected with two phases of conductors A, B and C, D for each electrode. A movable body 3 comprises an insulator 31 arranged, on the surface, with stripe electrodes 32n at a pitch 2λin the moving direction. The fixed bodies 1, 2 are positioned such that the electrodes are shifted byλ/ 2 by holding the gap through a spacer 4. A positive voltage is applied to phase C under a state where the electrode 32n is touching the electrode 22b. When a negative voltage is applied to the electrode of phase A, the electrode 32n is attracted electrostatically to the electrode of phase A. In other words, the mover is moved to the right. Subsequently, the voltage of phase C is brought to zero. When a positive voltage is applied to the electrode of phase D, the electrode 32n is attracted electrostatically to the electrode of phase D and the mover 3 is moved to the right.
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