| 摘要 |
<p>PURPOSE: To industrially advantageously and efficiently clean and remove dust and contaminant depositing on the surface of a glass substrate, moreover, blot and irregular surface and, to make the surface clean by using a water compsn. containing a chelating agent, alkali material and one kind of surfactant selected from the group consisting of nonion surfactants and anion surfactants. CONSTITUTION: A glass substrate is cleaned with a water compsn. containing a chelating agent, alkali material and one kind of surfactant selected from the group consisting of nonion surfactants and anion surfactants. As for nonion surfactants, polyoxyethylene-based surfactants are preferable, and especially alkylallylethers of these are preferable. As for anion surfactants, alkylallyl sulfonates are preferable. As for the chelating agent, ethylenediamine tetraacetate, trimetylenediamine tetraacetate and the like are preferably used.</p> |
