| 摘要 |
PURPOSE: To improve the yield and the reliability by eliminating the disturbance of a normal operation even if spherical fine particles for forming an adhered part are introduced into an air gap. CONSTITUTION: An upper stopper board 5 and a lower stopper board 6 formed at an engaged part 7 of a sensor chip side are adhered via adhering parts 8 to the upper and lower surfaces of a sensor chip 1 having a weight 2 and a beam 3 for supporting the weight 2. The parts 8 are formed of spherical fine particles having uniform particle size and adhesive. A distance between the chip 1 and the boards 5, 6 is determined according to the diameter of the particle. |
