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发明名称
VAPOR-DEPOSITING DEVICE
摘要
申请公布号
JPH08236449(A)
申请公布日期
1996.09.13
申请号
JP19950040230
申请日期
1995.02.28
申请人
NEC CORP
发明人
FUJISAKI HIROSHI
分类号
C23C14/26;C23C14/30;H01L21/203;(IPC1-7):H01L21/203
主分类号
C23C14/26
代理机构
代理人
主权项
地址
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