| 摘要 |
<p>PURPOSE: To make it possible to correct the mispositioning of a glass substrate generated by a cassette and to place this substrate on an inspection table. CONSTITUTION: This centering mechanism is composed of two sets of roller sections 61, 62 which are disposed movably in an X direction on a base plate B and respectively have the length Wy equal to the max. longitudinal width WH of the glass substrate 1 to be centered. Both roller sections 61, 62 consist of driving rollers 613, 623 which are pivotally supported parallel in proximity to each other and have a large diameter and free rollers 614, 624 of a small diameter. The spacings on the innermost side on the outer peripheries of both driving rollers 613, 623 are set at the transverse width of the glass substrate. The front surfaces on the outer peripheries of both driving rollers 613, 623 are provided with motors 615, 625 which respectively rotate on the inner side.</p> |
