| 摘要 |
PURPOSE: To obtain a resist compsn. excellent in heat resistance and resolution and not practically generating scum by using a specified novolak resin as alkali- soluble novolak resin. CONSTITUTION: In this resist compsn. contg. alkali-soluble novolak resin and a compd. having a quinonediazido group, the novolak resin is an alkali-soluble novolak resin having a wt. average mol.wt. of 2,000-15,000 separated from a reactional product obtd. by bringing phenol and aldehyde into a reaction in aγ-butyrolactone solvent in the presence of an acidic catalyst and this resist compsn. does not practically generate scum. Such alkali-soluble novolak resin can be used for a positive type resist as it is but a low mol.wt. part is removed so that the wt. average mol.wt. is regulated to 2,000-15,000, preferably 4,000-10,000. |
