| 摘要 |
PURPOSE: To provide an acceleration sensor in which a decrease in size and an increase in sensitivity can be performed. CONSTITUTION: An acceleration sensor 1 comprises a thin film part 3 for forming a strain gage 5, a block 6, a cavity 7 and a communicating port 9. The part 3 is formed on the surface side of a p-type silicon substrate 2. The block 6 protrudes from the lower part of the part 3. The cavity 7 encloses the base end of the block 6 at the lower side of the part 3. The port 9 communicates the cavity 7 with the rear side of the board 2. The block 6 is a substantially square truncated conical shape, and its base end is contracted. The width w3 of the cavity 7 is larger than the width w6 of the port 9. |
