| 摘要 |
PURPOSE: To eliminate lowering of mounting precision caused by change of a relative position of a head and a camera due to thermal expansion of a holder wherein a head and a camera are built integrally which is caused by heat generation of a motor for moving a nozzle up and down. CONSTITUTION: Misalignment of a nozzle 2 due to thermal expansion of a holder 3 caused by heat generation of a motor 5 which drives a head is detected by a camera 19 for chip recognition. The misalignment is found by observing a mark 18 formed in a specified position by a camera 4 for substrate recognition. Thereafter, a chip 10 is transferred and mounted on a substrate 15 while movement stroke of a head is corrected based on the determined misalignment. |
