| 摘要 |
PURPOSE: To make possible highly accurate positioning and motion control in three dimensions by driving a main stage by a commutator linear motor in a two-dimensional plane and using an air bearing. CONSTITUTION: Guides 18a, 18b are at right angles with a surface 12a (X-Y face) and have guides surfaces 180a, 180b in the direction of X. The guide surface 180a of the guide 18a shows the way by leading to an air bearing and vacuum structure 100, and is fixed at one end of a beam 20, which is moved in the direction of X. A guide face in the direction of Y is formed in the side of the beam 20, and a main stage (stages 22a, 22b) makes motion possible along the guide face in the direction of Y. Magnetic tracks 16a, 16b are mounted on a base 12 through respective spacers 14a, 14b, and the guides 18a, 18b mounted on the base 12 are provided on the respective magnetic tracks 16a, 16b. The spacers 14a, 14b form respective rectangular columns in the direction of X, and play a role of an internal cooling duct for sucking heat from the neighborhood of the tracks 16a, 16b. |
