PROXIMITY ULTRASONIC MICROSCOPE

摘要

PURPOSE: To provide an ultrasonic microscope (SAM) extremely high in resolving power. CONSTITUTION: A sample 3 is thinly held between two piezoelectric membranes 1, 2. Voltage is applied to one piezoelectric membrane by the preobe 6 of the so called scanning probe microscope such as an atomic force microscope(AFM) or a tunneling acoustic microscope(TAM) to locally excite ultrasonic waves. The ultrasonic waves propagated through the sample are detected by the other piezoelectric membrane. The probe is secondarily scanned and the intensity and phase of ultrasonic wave detected corresponding to the position of the probe (position of an ultrasonic source) are displayed as an image.