| 摘要 |
PURPOSE: To provide the measuring method of stepped part of which the measurement precision is not affected at all by the oscillation and the positional slippage of the levels of observation and measurement point. CONSTITUTION: The surface of a substrate 101 is coted with polyimide material or silicon material so as to form a transparent film in thickness not exceeding about 1μm forming a viscous transparent film 103 in even thickness. Thus, the irregularity of the substrate 101 directly corresponds to the thickness of the transparent film 103. That is, assuming an arbitrary point of the surface of the substrate 101 to be a point X, the value of (the value at the point X) + (the film pressure at the point X) may have a constant value, regardless of the position of the point X. Furthermore, assuming the observation points to be the points a and b, the difference Da-Db of the film thickness Da and Db will become the measurement value of the stepped part 102. After the measurement of this stepped part 102, the viscous transparent film 103 is released using a solvent to restore the substrate 101 to the state before the measurement of the stepped part 102 to finish the stepped part measurement step.
|
