SEMICONDUCTOR ACCELERATION SENSOR

摘要

PURPOSE: To obtain a semiconductor acceleration sensor which can be used in a high-temperature region by using a thermistor instead of a piezo resistor and in which the temperature compensation is not required by always maintaining the surrounding temperature of a cantilever constant. CONSTITUTION: The semiconductor acceleration sensor comprises a cantilever 6 formed on a silicon wafer, and a pair of heaters (an upper heater 4 and a lower heater 5) made of a thermistor 7 formed on the cantilever 6, so disposed as to sandwich the cantilever 6 therebetween, disposed as to oppose via a predetermined distance and formed with a predetermined temperature gradient.