发明名称 AUTOMATIC SUPPLYING AND ERASING METHOD OF SEMICONDUCTOR INSPECTION PROGRAM
摘要 PURPOSE: To provide the automatically supplying required inspection program by comprehending in-process IC before inspecting step as well as the erasing method of unnecessary inspection program after finishing the in-process step. CONSTITUTION: A production control system 320 and a control device 304, the device 304 and an inspection program file device 302; the device 304 and an inspection program processing device 104 are connected by net works respectively shown by arows 203, 313, 203 so as to receive an in-process part names 321 and a customer specification codes 322 received orders from customers are received by the device 304. Through these procedures, the required inspection programs are assigned and if the inspection program is not found on the inspection program file device 302, the file is transferred and after finishing the in- process steps, any unnecessary inspection programs are erased.
申请公布号 JPH08236595(A) 申请公布日期 1996.09.13
申请号 JP19950040215 申请日期 1995.02.28
申请人 NEC CORP 发明人 MAEDA TETSUNORI
分类号 G01R31/26;G01R31/28;G06F11/22;H01L21/66 主分类号 G01R31/26
代理机构 代理人
主权项
地址