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发明名称
MULTIAXIAL POSITIONING DEVICE
摘要
申请公布号
JPH08233524(A)
申请公布日期
1996.09.13
申请号
JP19950040670
申请日期
1995.02.28
申请人
NIKON CORP
发明人
TOYAMA KIYOSHI;MAEDA NOBUO
分类号
G01B9/02;G01B11/00;G01B11/24;G01B11/245;(IPC1-7):G01B11/00
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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