发明名称 |
Scanning probe microscope |
摘要 |
<p>A scanning type probe microscope apparatus for measuring a surface state of a sample by scanning the sample by use of a probe is disclosed. In the apparatus, the sample is inclined relative to a scan direction of the probe by a inclination mechanism. Of a signal component corresponding to the surface state of the sample, a signal component having an optional space frequency is selected to be detected by a detecting circuit. The inclination mechanism is controlled on the basis of a detection result of the detecting circuit. <IMAGE></p> |
申请公布号 |
EP0517270(B1) |
申请公布日期 |
1996.09.11 |
申请号 |
EP19920109595 |
申请日期 |
1992.06.05 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MATSUDA, HIROSHI;KAWADE, HISAAKI;EGUCHI, KEN;YANAGISAWA, YOSHIHIRO;TAKEDA, TOSHIHIKO |
分类号 |
G01B7/34;G01B21/30;G01N37/00;G01Q10/02;G01Q30/20;G01Q60/10;G01Q80/00;G01Q90/00;G11B9/00;G11B9/14;(IPC1-7):G01B7/34;G01N27/00 |
主分类号 |
G01B7/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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