| 发明名称 |
Tetraphenol compounds, process for producing the same and their use as photosensitisers |
| 摘要 |
<p>A tetraphenol compound represented by the formula (I): <CHEM> wherein R<1>, R<2>, R<3> and R<4> represent hydrogen, 1,2-naphthoquinonediazide-4-sulfonyl or 1,2-naphthoquinonediazide-5-sulfonyl and a method for producing the compound are provided, and the compound can be used as a photosensitizer for a positive resist which exhibits superior properties.</p> |
| 申请公布号 |
EP0731074(A2) |
申请公布日期 |
1996.09.11 |
| 申请号 |
EP19960103563 |
申请日期 |
1996.03.07 |
| 申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
ICHIKAWA, KOJI;OSAKI, HARUYOSHI;TOMIOKA, JUN |
| 分类号 |
C07C37/11;C07C39/15;C07C303/28;C07C309/53;C07C309/76;C08F2/50;G03F7/022;(IPC1-7):C07C39/15 |
主分类号 |
C07C37/11 |
| 代理机构 |
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