An energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material

摘要

The present invention is directed to energy-sensitive resist materials and to a process for device fabrication in which energy-sensitive resist materials are used. The energy-sensitive resist materials contain a polymer wherein at least 10 mole percent of the repeating units that make up the polymer have a sulfonamide moiety. The aqueous base solubility of the sulfonamide moiety provides the polymer with desirable properties. The energy sensitive resist materials also contain a compound that generates acid when exposed to radiation. In the process of the present invention, a film of the energy-sensitive material is formed on a substrate. The film is exposed to delineating radiation. The pattern is developed by a post-exposure bake step followed by application of an aqueous base developer solution. Exposing the energy-sensitive resist material to radiation alters the aqueous base solubility of the energy-sensitive resist material, rendering the portion of the material that was exposed to radiation significantly more soluble in the developer solution than the portion of the material that was not exposed to radiation. Because the sulfonamide moiety is soluble in developer solution, less of a chemical change is needed to convert the energy sensitive resist material from relatively insoluble to relatively soluble in aqueous base developer solution than comparable energy sensitive resist materials that do not have sulfonamide moieties incorporated into the polymers contained therein.