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发明名称
摘要
申请公布号
JP2533706(B2)
申请公布日期
1996.09.11
申请号
JP19910234404
申请日期
1991.09.13
申请人
HITACHI LTD
发明人
HASHIMOTO ISAO;OOISHI SEITARO
分类号
C23C14/32;C23C14/48;C23C14/56;(IPC1-7):C23C14/56
主分类号
C23C14/32
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代理人
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