NEW TUNGSTEN WELDING PROCESS

摘要

A method is disclosed for making a tungsten (W) plug comprising the steps: a) depositing a nucleation layer (50); and b) depositing at least three successive layers of W (60A, 60B, etc.) on the nucleation layer within a contact hole (25). The layers of W are deposited alternately at a fast rate of deposition of greater than 40Å/sec. and a slow rate of deposition of less than 40Å/sec.