Gas friction vacuum pump having at least three differently configured pump stages releasably connected together

摘要

PCT No. PCT/EP93/00984 Sec. 371 Date Nov. 16, 1994 Sec. 102(e) Date Nov. 16, 1994 PCT Filed Apr. 23, 1993 PCT Pub. No. WO93/23672 PCT Pub. Date Nov. 25, 1993The invention relates to a gas friction vacuum pump having at least two differently configured pump stages each having a rotor section and a housing section. In order to adapt the pump to different applications, the pump stages are detachably connected with each other so that different inlet stages can be mounted on the high-vacuum side.