Device for the treatment of substrates at low temperature,申请号EP19930203402-传众专利搜索

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发明名称	Device for the treatment of substrates at low temperature
摘要
申请公布号	EP0601656(B1)	申请公布日期	1996.09.11
申请号	EP19930203402	申请日期	1993.12.03
申请人	PHILIPS ELECTRONICS N.V.	发明人	BAGGERMAN, JACOBUS ANTONIUS GIJSBERTUS;HACK, RONNIE ANTONIUS ADRIANUS;VAN VOORST VADER, PIETER JOHANNES QUITUS
分类号	H01L21/203;C23C14/34;C23F4/00;H01L21/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/00	主分类号	H01L21/203
代理机构		代理人
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