| 摘要 |
PURPOSE: To make the tension of a row of wires for grinding a work relatively large and to cut it with high accuracy by using a grooved roller nearest to the delivery side of the work as a grooved roller driving the many rows of wires for cutting the work into many wafers. CONSTITUTION: A wire saw comprises a wire 2 which is wound on many ring- shaped grooves formed at a specified pitch on each surface of three grooved rollers 1-A to 1-C, for example, and forms rows of wires 3-a to 3-c of a specified pitch. The rows of wires 3-a to 3-b are driven in a predetermined direction and a work lifting bed 4 is gradually lifted while pouring working fluid having abrasive grains and thereby the work 5 is cut into many wafers. In this respect, one of two grooved rollers 1-B and 1-C between which a row of wires 3-a for cutting the work 5 is stretched taut, for example, the roller 1-B on the delivery side of the wires is used as a driving grooved roller. Tension then is set in the relationship of 3-a>3-b>3-c, for example; that is, the tension of the row of wires 3-a is set at the maximum value. |
