| 摘要 |
PURPOSE: To absorb errors in three-dimensional directions to perform the positioning of a workpiece by fitting the intermediate member and shaft body of floating mechanism to each other through the convex spherical part of a spherical bearing, and making a floating body movable and rotatable in relation to the shaft body. CONSTITUTION: An intermediate member 28 and a shaft body 27 are fitted to each other through a convex spherical part 50a of a spherical bearing so as to support a floating body rotatably. The floating body is supported in a floating state by a spring 32 so as to be rotatable and movable in a horizontal direction and within a horizontal plane. The floating body is also movable in a vertical direction by clearances formed between the floating body, and a plurality of spherical body groups 30a, 30b and the intermediate member 28, but the movement within the horizontal plane is regulated by the clearancesα,γ, and the vertical moving quantity is regulated by another clearanceβ. Errors in the horizontal direction, rotating direction and vertical direction can thereby be absorbed respectively. A positioning shaft 35 is then engaged with a positioning member 37 by a positioning cylinder 36 to fix the floating body.
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