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发明名称
Forbedret glødetrådsreaktor til kemisk dampafsættelse
摘要
申请公布号
DK0521078(T3)
申请公布日期
1996.09.09
申请号
DK19910906869T
申请日期
1991.03.13
申请人
DIAMONEX, INCORPORATED
发明人
GARG, DIWAKAR;TSAI, WILMAN;IAMPIETRO, ROBERT, L.;KIMOCK, FRED, M.;KELLY, C., MICHAEL
分类号
C23C16/27;C23C16/44;C23C16/455;C23C16/458;(IPC1-7):C23C16/26
主分类号
C23C16/27
代理机构
代理人
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