| 发明名称 |
NOVEL SILICON CARBIDE DUMMY WAFER |
| 摘要 |
The present invention relates to an unsiliconized or siliconized wafer consisting essentially of recrystallized silicon carbide, the wafer having a diameter of at least 150 mm and a thickness of between 0.5 and 2 mm, and having a porosity or free silicon content between 15 v/o and 43 v/o.
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| 申请公布号 |
CA2188290(A1) |
申请公布日期 |
1996.09.06 |
| 申请号 |
CA19962188290 |
申请日期 |
1996.02.28 |
| 申请人 |
SAINT-GOBAIN/NORTON INDUSTRIAL CERAMICS CORPORATION |
发明人 |
WILLKENS, CRAIG A.;ARSENAULT, NORMAND P. |
| 分类号 |
C04B35/565;C04B35/573;C04B38/00;C04B41/87;C30B25/02;H01L21/02;(IPC1-7):H01L21/00;H01L21/18;C04B35/576;H01L21/70 |
主分类号 |
C04B35/565 |
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