| 发明名称 |
Boron-aluminum nitride coating and method of producing same |
| 摘要 |
<p>Boron-aluminum nitride BxAl1-xNy (0.001</=x</=0.70, 0.85</= y</=1.05) films having wurtzite type structure are proposed. The material has higher hardness, higher sound velocity and wider band gap than hexagonal aluminum nitride (AlN). <IMAGE></p> |
| 申请公布号 |
EP0730044(A2) |
申请公布日期 |
1996.09.04 |
| 申请号 |
EP19950308297 |
申请日期 |
1995.11.21 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LIMITED |
发明人 |
UTSUMI, YOSHIHARU;IMAI, TAKAHIRO;FUJIMORI, NAOJI |
| 分类号 |
C23C14/06;C23C14/34;C23C16/34;C23C30/00;(IPC1-7):C23C30/00 |
主分类号 |
C23C14/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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