Positive resist composition,申请号EP19910107339-传众专利搜索

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发明名称	Positive resist composition
摘要
申请公布号	EP0461388(B1)	申请公布日期	1996.09.04
申请号	EP19910107339	申请日期	1991.05.06
申请人	SUMITOMO CHEMICAL COMPANY, LIMITED	发明人	UETANI, YASUNORI
分类号	G03F7/022;(IPC1-7):G03F7/039	主分类号	G03F7/022
代理机构		代理人
主权项
地址

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