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发明名称
摘要
申请公布号
JP2531818(B2)
申请公布日期
1996.09.04
申请号
JP19900040352
申请日期
1990.02.21
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
ENDO KOICHI
分类号
H01L27/04;G05F1/56;G05F1/573;H01L21/338;H01L21/822;H01L29/812;H03K17/081;H03K17/687;(IPC1-7):G05F1/56
主分类号
H01L27/04
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代理人
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地址
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