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发明名称
Apparatus for measuring semiconductor layer thickness
摘要
申请公布号
EP0567745(B1)
申请公布日期
1996.09.04
申请号
EP19930103680
申请日期
1993.03.08
申请人
MITSUBISHI DENKI KABUSHIKI KAISHA;JASCO CORPORATION
发明人
HATTORI, RYO;NISHIZAWA , SEIZI;TAKAHASHI, TOKUJI;FUKASAWA, RYOICHI
分类号
G01B11/06;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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