发明名称 Apparatus and method for polishing a workpiece
摘要 <p>A rotating polishing wheel having secured to its top surface a polishing pad and a vertically movable carrier element for carrying a workpiece to be polished into contact with the polishing pad and exerting a desired pressure on the workpiece. Operatively attached to the carrier is a conditioning element movable with the carrier and having on its bottom surface cutting means disposed in a circular configuration for conditioning the polishing pad by contact therewith.</p>
申请公布号 GB9613871(D0) 申请公布日期 1996.09.04
申请号 GB19960013871 申请日期 1996.07.02
申请人 SPEEDFAM CORPORATION 发明人
分类号 B24B53/00;B24B53/007;B24B53/017 主分类号 B24B53/00
代理机构 代理人
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