发明名称 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND FABRICATION OF THE SAME
摘要 <p>PURPOSE: To reduce fabrication cost of EEPROM while controlling fluctuation of threshold value of a memory cell transistor. CONSTITUTION: An N-type well and an N-type ground wiring layer are diffused and formed into a P-type substrate, the word lines using P-type polysilicon are formed in the N-type well, the drain region and source region of memory cell transistor are formed by ion implantation of arsenic into the P-type substrate adjacent to the N-type well, and floating gates are continuously formed keeping the predetermined interval on the channel region and word line region provided between the drain region and source region. The P-type polysilicon provided opposed to the floating gates works as a control gate of the memory cell transistor. When a pulse which alternately repeats +3V and -10V is applied to the word lines, the threshold value of the memory cell transistor is converged to the value corresponding to +3V of this pulse.</p>
申请公布号 JPH08227983(A) 申请公布日期 1996.09.03
申请号 JP19950290958 申请日期 1995.11.09
申请人 NKK CORP 发明人 GOTO HIROSHI
分类号 G11C17/00;C04B41/52;G11C16/04;H01L21/8247;H01L27/115;H01L29/788;H01L29/792;(IPC1-7):H01L27/115;H01L21/824;G11C16/06 主分类号 G11C17/00
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