| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron source provided with a large surface area by forming a main deposition part of a microtip by means of electrophoresis or binding electrochemical deposition of metal and carbon diamond or of diamond type carbon. SOLUTION: Holes 10 are formed on a negative electrode conductor 4 through a grid 8 and an insulating layer 6, and a microtip 12 is formed in each of the holes 10. Then, each of the microtip 12 is covered with a main deposition part 13 made of carbon diamond particles or diamond type carbon particles. This deposition part 13 is formed by means of electrophoresis or binding electrochemical deposition of metal and carbon diamond or of diamond type carbon. The hole 10 and the microchip 12 are positioned in the area in which the grid 8 crosses the conductor 4, and when a proper voltage is applied between the conductor 4 and grid 8, an electron is emitted from the microtip 12. In this constitution, a substrate with a large surface area can be used, and an electron source with a large surface area can be provided.</p> |
