METHOD AND DEVICE FOR MEASURING SURFACE SHAPE USING DIFFRACTION OPTICAL ELEMENT,申请号JP19950288996-传众专利搜索

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发明名称	METHOD AND DEVICE FOR MEASURING SURFACE SHAPE USING DIFFRACTION OPTICAL ELEMENT
摘要
申请公布号	JPH08226806(A)	申请公布日期	1996.09.03
申请号	JP19950288996	申请日期	1995.11.07
申请人	PIITA DE GURUUTO	发明人	PIITA DE GURUUTO
分类号	G01B11/24;G01B11/30;(IPC1-7):G01B11/24	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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