RADIATION SENSITIVE RESIN COMPOSITION

摘要

PURPOSE: To obtain a radiation sensitive resin compsn. having high resolving power, high sensitivity and a wide defocus latitude. CONSTITUTION: This radiation sensitive resin compsn. contains a water-insoluble but alkali-soluble resin and a radiation sensitive compd. On an R-M characteristic curve showing the relation between the solution velocity R(μm/sec) of this compsn. and the concn. M of the relatively residual radiation sensitive compd. at the time of development with 2.38wt.% aq. soln. of tetramethylammonium hydroxide at 23 deg.C, the difference dM between the value of M in the case of R=0.02μm/sec and the value of M in the case of R=0.002μm/sec is <=0.1.