| 摘要 |
PROBLEM TO BE SOLVED: To quickly process a photosensitive layer and provide variability by concurrently exposing the photosensitive layer with multiple beams. SOLUTION: A beam split structure can generate hundreds of individual laser beams (2.11 ,..., 2.1N), (2.21 ,..., 2.2N) according to its structure and distribute these laser beams on the surface 11a of an unprocessed product 11 through the corresponding number of elements (61 ,..., 6N) of a deflection optical system 6. A material irradiating means 1 irradiates the surface 11a of the unprocessed product 11 with multiple individual beams (2.11 ,..., 2.1N). Individual beams (2.11 ,..., 2.1N) are deflected by the elements (61 ,..., 6N) of the deflection optical system 6 corresponding to the beams, and various different points or areas on the surface 11a of the object 11 to be processed can be concurrently radiated. |
