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发明名称
摘要
申请公布号
JPH08508315(A)
申请公布日期
1996.09.03
申请号
JP19940521092
申请日期
1994.03.07
申请人
发明人
分类号
F04B53/02;B01F3/02;B01J4/02;B01J7/00;C01B21/076;C01G1/00;C01G3/00;C01G23/00;C04B38/00;C23C16/40;C23C16/44;C23C16/448;F04B53/16;F23K5/22;H01L39/24;(IPC1-7):C23C16/44
主分类号
F04B53/02
代理机构
代理人
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