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发明名称
MASS SPECTROMETRIC DEVICE FOR TRACE ELEMENT OF PLASMA ION SOURCE
摘要
申请公布号
JPH08227690(A)
申请公布日期
1996.09.03
申请号
JP19950319981
申请日期
1995.12.08
申请人
HITACHI LTD
发明人
OKAMOTO YUKIO
分类号
G01N27/62;H01J37/317;H01J49/06;H01J49/26;H01J49/28;H01J49/46;H05H3/06;(IPC1-7):H01J49/46
主分类号
G01N27/62
代理机构
代理人
主权项
地址
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