| 摘要 |
PURPOSE: To conduct three-dimensional machining the depth of which is different from part to part by making the transmissivity of the optical film formed at the prescribed position above a substrate different selectively and positionwise. CONSTITUTION: Almost all excimer laser beams reach the work 3 in the part that lacks an optical film 2d, imparting laser abrasion to the work 3. Meantime, with a total reflection film 21, the excimer laser beams are totally reflected without reaching the work 3, which consequently is not machined at all in the lower part of the total reflection film 21. Further, with a semi reflection film 22, the excimer laser beams are transmitted for only 50%, imparting laser abrasion to the work 3 in the lower part of the beams at approximately one half the depth in comparison to the part without the optical film. Thus, a three- dimensionally machined shape is formed in which the machined depth is different from part to part. |
