| 摘要 |
PURPOSE: To obtain an acceleration sensor, which can meet an acceleration parallel to a substrate, by a method wherein the sensor is constituted into such a structure that a voltage is fed to a beam for supporting a weight from one direction over the beam to a piezoelectric resistor formed on a diffused layer and an output voltage is led out from the direction intersecting orthogonally the one direction. CONSTITUTION: An acceleration sensor is provided with a vibrator 20, which has a weight 22 formed by a through etching through a substrate 11 and a beam 21 for supporting the weight 22 and is vibrated in the directions vertical and parallel to the substrate surface. Moreover, the sensor is constituted of a P-type or N-type diffused region arranged on the beam 21, is provided with a piezoelectric resistor 23, whose resistance value is changed by the deflection of the beam 21 due to the vibration of the vibrator 20, and an acceleration is detected from a change in the resistance value. Such the acceleration sensor is constituted into a structure, wherein a voltage Vi is fed to a U-axis in one direction over the beam 21 to the resistor 23, an output voltage Vo is led out from a V-axis direction, which intersects orthogonally the U-axis direction, over the beam 21 and a shearing stress in the beam 21 is measured from the resistance value, which is found by the supply voltage Vi and the output voltage Vo, of the resistor 23 to detect the acceleration. |
