发明名称 |
AEROSOL PROCESS FOR MANUFACTURE OF PLANER WAVEGUIDE |
摘要 |
The manufacture of glass films on substrates involves the flame reaction of an aerosol comprised of droplets of a solution containing all the precursors for the glass. A solution containing the precursors for all oxide components is atomized, and the resulting droplets are reacted in a flame to form spherical glass particles which are deposited on a heated substrate. By moving the substrate through the flame, a homogeneous deposit is achieved. Subsequent heat treatment in a furnace sinters the porous particle layer into a clear glass. The method has been successfully employed for the formation of sodium borosilicate glass films on silicon substrates and rare earth-doped multicomponent glass films for active devices. |
申请公布号 |
JPH08225957(A) |
申请公布日期 |
1996.09.03 |
申请号 |
JP19950282317 |
申请日期 |
1995.10.31 |
申请人 |
AT & T CORP |
发明人 |
AANDO HAAMAN KIRIAN;JIYON BAANETSUTO MATSUKUCHIESUNII;SEODOA FUREDERITSUKU MOASU |
分类号 |
G02B6/13;C01B21/48;C03B19/01;C03B19/12;C03B19/14;C03C17/02;C23C16/448;C23C16/453;C23C26/00;C30B29/06;G02B6/12;(IPC1-7):C23C26/00 |
主分类号 |
G02B6/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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