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发明名称
PATTERNING OF RESIST
摘要
申请公布号
JPH01162337(A)
申请公布日期
1989.06.26
申请号
JP19870322452
申请日期
1987.12.18
申请人
MATSUSHITA ELECTRON CORP
发明人
ONUMA MAKOTO
分类号
H01L21/027;G03C1/00;G03F7/00;G03F7/095;H01L21/30
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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