Micro-machined accelerometer array with shield plane

摘要

An accelerative force may be measured using a plurality of deflection elements (102), each deflection element (102) comprising an inertial mass (104), and at least one hinge (104) supporting the inertial mass (104) in a normal position. Application of a force to inertial mass (104) will result in the deflection of the inertial mass (104) in a first direction out of the normal position. The movement of the inertial mass (104) from the normal position stores energy in the hinges (108) which tends to move the inertial mass (104) in a second direction back to its normal position. Either the mass of the inertial mass (104), or the compliance of the hinges (108) is varied from one deflection element (102) in the array to another so that the force applied to the inertial masses (104) by simultaneous acceleration of the deflection elements (102) deflects some of the inertial masses (104). A detection means (112) senses if inertial masses (104) have deflected and produces an output representative of the applied force.