发明名称 MANUFACTURING METHOD OF BUMP OF SEMICONDUCTOR DEVICE
摘要 The method includes the steps of; forming an electrode pad(4) on a semiconductor chip(100), forming a passivation film(6) exposed to most of electrode pads; forming the first metal layer; forming the first mask layer having the first entrance unit in the region for a form of bump(16); forming the second metal layer in the first entrance unit; forming the second mask layer having a plurality of the second entrance unit; forming the third metal layer of an island type which is connected with the second metal layers respectively.
申请公布号 KR960011855(B1) 申请公布日期 1996.09.03
申请号 KR19920018468 申请日期 1992.10.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YUN, SANG - HYUN;KIM, JIN - TAE
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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