发明名称 |
MANUFACTURING METHOD OF BUMP OF SEMICONDUCTOR DEVICE |
摘要 |
The method includes the steps of; forming an electrode pad(4) on a semiconductor chip(100), forming a passivation film(6) exposed to most of electrode pads; forming the first metal layer; forming the first mask layer having the first entrance unit in the region for a form of bump(16); forming the second metal layer in the first entrance unit; forming the second mask layer having a plurality of the second entrance unit; forming the third metal layer of an island type which is connected with the second metal layers respectively. |
申请公布号 |
KR960011855(B1) |
申请公布日期 |
1996.09.03 |
申请号 |
KR19920018468 |
申请日期 |
1992.10.08 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
YUN, SANG - HYUN;KIM, JIN - TAE |
分类号 |
H01L21/60 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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