| 摘要 |
PURPOSE: To inspect the scanning performance of a light scanning type optical apparatus while being in use. CONSTITUTION: This light scanning type surface inspecting device is provided with a rotary polygon mirror 7, and it feeds a scanning beam 6b to a web W. The scanning beam 6b draws a scanning line 8 at a surface inspection position. When the performance of the surface inspecting device is to be inspected, a performance inspection chart 10 is fitted at the surface inspection position. The performance inspection chart 10 is provided with a target line and multiple marks crossing it, and the target line is aligned diagonally against the scanning line 8. The polygon mirror 7 is used to scan the target line, the absorbing pattern of the scanning beam 6b by the target line and line marks is measured, and the test signal indicating the performance of the surface inspecting device is obtained. |
